Applications Compendium | Contamination Control

As the size of semiconductors in integrated circuits continues to shrink, the impacts of trace level contaminants, particularly metals, on manufacturing yields are growing. Only instruments such as Agilent’s Triple Quadrupole ICP-MS’s are able to provide the high levels of sensitivity needed to examine the purity, particulates and packaging of semiconductors effectively. Our solutions enable the direct analysis of chemicals, eliminating dilution and sample contamination issues, and are supported by a comprehensive suite of sample handling, automation tools, and an unrivaled support structure for semiconductor users.

 

Resources

Agilent Atomic Spectroscopy Solutions for the Semiconductor Industry

Applications Compendium

Handbook of ICP-QQQ Applications using the Agilent 8800 and 8900

Primer

Determination of Trace Impurities in Electronic Grade Arsine by GC-ICP-QQQ

Application Note

Applications Compendium | Semiconductor Process Chemical Purity

Semiconductor fabrication processes require ultrapure chemicals for product washing, and these must be free of trace metals in order to prevent contamination. Analytical instruments with excellent levels of sensitivity are required to effectively detect contaminants, and must operate effectively in high matrix environments. With industry-leading precision and enhanced efficiency through automation solutions, Agilent’s ICP-MS ORS and ICP-MS/MS technology enables the direct measurement of process chemicals with reduced spectral interference.

 

Resources

Multielement Nanoparticle Analysis of Semiconductor Process Chemicals Using spICP-QQQ

Application Note

Measuring Inorganic Impurities in Semiconductor Manufacturing

Applications Compendium

Automated Analysis of Semiconductor Grade Hydrogen Peroxide and DI Water using ICP-QQQ

Application Note