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Tag: Applications Compendium
Applications Compendium | Contamination Control
As the size of semiconductors in integrated circuits continues to shrink, the impacts of trace level contaminants, particularly metals, on manufacturing yields are growing. Only instruments such as Agilent’s Triple Quadrupole ICP-MS’s are able to provide the high levels of sensitivity needed to examine the purity, particulates and packaging of semiconductors effectively. Our solutions enable the direct analysis of chemicals, eliminating dilution and sample contamination issues, and are supported by a comprehensive suite of sample handling, automation tools, and an unrivaled support structure for semiconductor users.
Resources
Agilent Atomic Spectroscopy Solutions for the Semiconductor Industry
Handbook of ICP-QQQ Applications using the Agilent 8800 and 8900
Determination of Trace Impurities in Electronic Grade Arsine by GC-ICP-QQQ
Applications Compendium | Semiconductor Process Chemical Purity
Semiconductor fabrication processes require ultrapure chemicals for product washing, and these must be free of trace metals in order to prevent contamination. Analytical instruments with excellent levels of sensitivity are required to effectively detect contaminants, and must operate effectively in high matrix environments. With industry-leading precision and enhanced efficiency through automation solutions, Agilent’s ICP-MS ORS and ICP-MS/MS technology enables the direct measurement of process chemicals with reduced spectral interference.
