Applications Compendium | Contamination Control

As the size of semiconductors in integrated circuits continues to shrink, the impacts of trace level contaminants, particularly metals, on manufacturing yields are growing. Only instruments such as Agilent’s Triple Quadrupole ICP-MS’s are able to provide the high levels of sensitivity needed to examine the purity, particulates and packaging of semiconductors effectively. Our solutions enable the direct analysis of chemicals, eliminating dilution and sample contamination issues, and are supported by a comprehensive suite of sample handling, automation tools, and an unrivaled support structure for semiconductor users.



Agilent Atomic Spectroscopy Solutions for the Semiconductor Industry

Applications Compendium

Handbook of ICP-QQQ Applications using the Agilent 8800 and 8900


Determination of Trace Impurities in Electronic Grade Arsine by GC-ICP-QQQ

Application Note